Resistive MEMS switches employ an electrostatically controlled cantilever beam whose lifetime depends on the occurrence of cantilever metal fatigue, contact wear, and cantilever deformation. Capacitive MEMS switches use a sensing element, such as a moving plate, to change capacitance and activate the switch.
MEMS is a mature but still evolving commercial technology. Various sensors for monitoring vibration, temperature, light, and linear and rotational motion and acceleration are some of the common MEMS applications. They can be found in military equipment, mobile phones, vehicles, and industrial and communication systems.