Radio frequency MEMS (RF-MEMS) are passive components such as attenuators that provide improved performance including better isolation, lower power consumption, smaller and lighter weight, and lower cost in multi-GHz applications . More recently, RF-MEMS have been fabricated using a surface micromachining process that uses two conductive thin film layers protected by polysilicon and aluminum on which the actual MEMS suspended electrostatically actuated membrane is constructed using electroplated gold. In addition, the use of gold-plated films minimizes metal-to-metal contact resistance.