Haptic feedback uses force, electrical signals, or sound pressure to create a sense of touch. Air-coupled ultrasonic transducers are used in current designs, but they are too bulky for widespread adoption. Instead, MEMS ultrasonic transducers (pMUTs) are being developed. The pMUT will have the same 40 kHz resonant frequency as today’s air-coupled ultrasound transducers, but be smaller and consume less power. Lead zirconate titanate (PZT) is used as the piezoelectric layer and deposited using radio frequency sputtering. The resonant cavity is formed by releasing circular thin films by deep reactive ion etching. These pMUTs are intended for use in large arrays. A single pMUT produces a sound pressure of 0.227 Pa when driven at 70 V peak-to-peak.