Semiconductor Piezoresistive Sensors
This sensor utilizes the piezoresistive effect of semiconductors. The strain of ordinary semiconductor materials is better than the strain sensitivity coefficient of metal materials. Using the piezoresistive effect of single crystal silicon, the components made by semiconductor technology on the basis of single crystal silicon, when the semiconductor is subjected to pressure, its resistance will change, thus forming a signal output of pressure change. The commonly used piezoresistive sensors are 4 equivalent strain elements to form a bridge. When the pressure changes, it is divided into two pairs to produce a change effect. One pair becomes larger and the other becomes smaller, resulting in an imbalance of the bridge. Input a voltage signal proportional to pressure. Its biggest feature is high sensitivity, large measurement range, strong output signal, and easy integration. However, its ability to resist oil pollution and particles is poor, and it must be isolated by medium to achieve accurate results.